• DocumentCode
    2104358
  • Title

    Feedback control of membrane displacement in RF-MEMS switches

  • Author

    Awad, Omar ; ElSinawi, A.H. ; Bakri-Kassem, Maher ; Landolsi, Taha

  • Author_Institution
    Dept. of Mech. Eng., American Univ. of Sharjah, Sharjah, United Arab Emirates
  • fYear
    2013
  • fDate
    8-11 Dec. 2013
  • Firstpage
    516
  • Lastpage
    519
  • Abstract
    Control of transient behavior of RF-MEMS switch membrane is crucial to the durability and reliability of the switch. This work presents a novel technique for controlling the displacement of the switch membrane. The technique shows exceptional capabilities of achieving soft landing of the membrane on contact pads at pull-in voltage, and significant improvement of pull-out transient. The control technique presented in this work is physical based and generic in nature, thus making it adaptable and scalable to any switch. Comparison between switch behavior with and without control shows 80% improvement in impact dynamics and approximately 70% improvement in overshoot and settling time during pull-out.
  • Keywords
    microswitches; transient analysis; RF MEMS switches; feedback control; membrane displacement; pull-in voltage; pull-out transient; soft landing; switch membrane; transient behavior; Atmospheric modeling; Capacitors; Integrated circuit modeling; Microswitches; Radio frequency; Transient analysis; Feedback control; Galerkin method; Pull-in dynamics; Pull-out transient; RF-MEMS switch;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics, Circuits, and Systems (ICECS), 2013 IEEE 20th International Conference on
  • Conference_Location
    Abu Dhabi
  • Type

    conf

  • DOI
    10.1109/ICECS.2013.6815465
  • Filename
    6815465