DocumentCode
2104358
Title
Feedback control of membrane displacement in RF-MEMS switches
Author
Awad, Omar ; ElSinawi, A.H. ; Bakri-Kassem, Maher ; Landolsi, Taha
Author_Institution
Dept. of Mech. Eng., American Univ. of Sharjah, Sharjah, United Arab Emirates
fYear
2013
fDate
8-11 Dec. 2013
Firstpage
516
Lastpage
519
Abstract
Control of transient behavior of RF-MEMS switch membrane is crucial to the durability and reliability of the switch. This work presents a novel technique for controlling the displacement of the switch membrane. The technique shows exceptional capabilities of achieving soft landing of the membrane on contact pads at pull-in voltage, and significant improvement of pull-out transient. The control technique presented in this work is physical based and generic in nature, thus making it adaptable and scalable to any switch. Comparison between switch behavior with and without control shows 80% improvement in impact dynamics and approximately 70% improvement in overshoot and settling time during pull-out.
Keywords
microswitches; transient analysis; RF MEMS switches; feedback control; membrane displacement; pull-in voltage; pull-out transient; soft landing; switch membrane; transient behavior; Atmospheric modeling; Capacitors; Integrated circuit modeling; Microswitches; Radio frequency; Transient analysis; Feedback control; Galerkin method; Pull-in dynamics; Pull-out transient; RF-MEMS switch;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics, Circuits, and Systems (ICECS), 2013 IEEE 20th International Conference on
Conference_Location
Abu Dhabi
Type
conf
DOI
10.1109/ICECS.2013.6815465
Filename
6815465
Link To Document