Title :
Novel Atomic Force Microscope Probes with Integrated Electrostatic Actuation and Optical Detection
Author :
Degertekin, F. Levent
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
In this work, a new class of atomic force microscope (AFM) probe, called force-sensing integrated readout and active tip (FIRAT), is developed. It combines several micromechanical devices (MEMS) techniques, diffraction based optical sensing and electrostatic actuation, to improve the speed and sensitivity of AFM systems for imaging and force measurement applications both in air and in liquid media.
Keywords :
atomic force microscopy; electrostatic actuators; force measurement; optical sensors; AFM sensitivity; FIRAT probe; MEMS techniques; air media; atomic force microscope probes; diffraction based optical sensing; force measurement applications; force-sensing integrated readout active tip; imaging applications; integrated electrostatic actuation; liquid media; micromechanical devices; optical detection; Atom optics; Atomic force microscopy; Atomic measurements; Electrostatic actuators; Integrated optics; Micromechanical devices; Optical detectors; Optical microscopy; Optical sensors; Probes;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382666
