DocumentCode
2107919
Title
Portable MEMS power sources
Author
Schmidt, M.A.
Author_Institution
Microsystems Technol. Lab., MIT, Cambridge, MA, USA
fYear
2003
fDate
13-13 Feb. 2003
Firstpage
394
Abstract
Two devices are described that realize MEMS-based power sources as alternatives to batteries. The first is thermoelectric which utilizes a SiGe thermopile on a silicon nitride membrane. The device generates power at 500/spl deg/C. The second device is an engine that consists of a high-speed rotating silicon turbine.
Keywords
engines; micromechanical devices; thermoelectric conversion; thermopiles; turbines; 500 degC; Si; SiGe; SiGe thermopile; SiN; high-speed rotating silicon turbine engine; portable MEMS power source; silicon nitride membrane; thermoelectric device; Batteries; Biomembranes; Chemical technology; Combustion; Fuels; Micromechanical devices; Power generation; Tellurium; Temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location
San Francisco, CA, USA
ISSN
0193-6530
Print_ISBN
0-7803-7707-9
Type
conf
DOI
10.1109/ISSCC.2003.1234352
Filename
1234352
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