Title :
Fabrication of electrically-pumped resonance-cavity membrane-reflector surface-emitters on silicon
Author :
Wenjuan Fan ; Deyin Zhao ; Chuwongin, Santhad ; Jung-Hun Seo ; Hongjun Yang ; Berggren, Jesper ; Hammar, Mattias ; Zhenqiang Ma ; Weidong Zhou
Author_Institution :
Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX, USA
Abstract :
Various lasers and light sources on Si via heterogeneous integration of Si/III-V have been reported based on direct growth on Si or wafer bonding technology. We reported earlier optically-pumped Si membrane-reflector vertical-cavity surface-emitting lasers (MRVCSELs) fabricated by low-temperature membrane transfer printing processes. Here we report electrically-pumped devices based on an intra-cavity contact configuration.
Keywords :
III-V semiconductors; elemental semiconductors; integrated optoelectronics; laser cavity resonators; optical elements; optical fabrication; optical pumping; printing; quantum well lasers; silicon; surface emitting lasers; wafer bonding; MR-VCSEL; Si; Si-III-V heterogeneous integration; electrically-pumped resonance-cavity membrane-reflector surface-emitters; intracavity contact configuration; light sources; low-temperature membrane transfer printing; optically-pumped membrane-reflector vertical-cavity surface-emitting lasers; wafer bonding; Cavity resonators; Current measurement; Silicon; Substrates; Temperature measurement; Vertical cavity surface emitting lasers;
Conference_Titel :
Photonics Conference (IPC), 2013 IEEE
Conference_Location :
Bellevue, WA
Print_ISBN :
978-1-4577-1506-8
DOI :
10.1109/IPCon.2013.6656459
