Digital closed-loop control based on adaptive filter for drive mode of a MEMS gyroscope

Author

Liu, Dachuan ; Lu, N.N. ; Cui, J. ; Lin, L.T. ; Ding, H.T. ; Yang, Z.C. ; Hao, Y.L. ; Yan, Guizhen

Author_Institution

Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China

fYear

2010

fDate

1-4 Nov. 2010

Firstpage

1722

Lastpage

1726

Abstract

This paper describes the design of a digital closed drive loop for a MEMS vibratory, vacuum packaged gyroscope. The displacement of the gyroscope is demodulated by the adaptive filter-least mean square (LMS) though which the amplitude and phase of the displacement are separated for respective control. The amplitude is kept constant by the automatic gain control (AGC) method with a proportion-integral (PI) controller while the phase is controlled by phase locked loop (PLL). Results of experiments carried out on field-programmed-gate-array (FPGA) with a doubly decoupled bulk gyroscope are shown to be in close agreement with simulation results. The amplitude variance of the detect signal of drive mode is 28ppm in half an hour while the phase variance is 770ppm.

Keywords

adaptive filters; automatic gain control; closed loop systems; digital control; displacement measurement; gyroscopes; phase locked loops; MEMS gyroscope; adaptive filter; automatic gain control; digital closed-loop control; doubly decoupled bulk gyroscope; drive mode; least mean square; phase locked loop; proportion-integral controller; vacuum packaged gyroscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2010 IEEE

Conference_Location

Kona, HI

ISSN

1930-0395

Print_ISBN

978-1-4244-8170-5

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2010.5689902

Filename

5689902