Resonance frequency tuning method using CNT wire synthesis

The resonance frequency of a MEMS resonator was adjusted using CNT wire synthesis on the side of the resonator. The resonance frequency tuning method was examined by a simple MEMS cantilever model in this report. The simple cantilever was made using MEMS processes and main material of the model was low stress silicon nitride film. The resonance frequency of the MEMS cantilever was measured with laser vibrometer. The cantilever had bumps on its side to synthesize wires. The resonance frequency was increased by synthesized wires which increased stiffness of the cantilever, and it was easily recovered using electrical cutting of the wires. This resonance frequency tuning method can easily adjust and return the resonance frequency only with foundation laboratory equipments (function generator, CNT dispersion).