Title :
Control of crystalline orientation and diameter of Si nanowires based on VLS method and electrodeposition of catalyst using AAO template
Author :
Wang, Q. ; Shimizu, T. ; Shingubara, S.
Author_Institution :
Kansai Univ., Suita, Japan
Abstract :
Control of epitaxial crystal growth orientation and diameter of Si nanowires were accomplished using anodic aluminum oxide (AAO) template formed on Si substrates. Vapor-Liquid-Solid (VLS) growth of Si nanowires was initiated on the size-controlled Au catalyst electrodeposited in AAO, and growth direction of nanowire was determined by choosing orientation of Si substrate.
Keywords :
catalysts; electrodeposition; elemental semiconductors; nanofabrication; nanowires; semiconductor growth; silicon; AAO template; Si; VLS growth; anodic aluminum oxide template; catalyst electrodeposition; crystalline orientation control; epitaxial crystal growth orientation control; nanowires; vapor-liquid-solid growth; Epitaxial growth; Gold; Hafnium; Nanowires; Silicon; Substrates; AAO template; CVD facility; Si nanowires; VLS;
Conference_Titel :
Future of Electron Devices, Kansai, (IMFEDK), 2011 International Meeting for
Conference_Location :
Osaka
Print_ISBN :
978-1-61284-145-8
Electronic_ISBN :
978-1-61284-147-2
DOI :
10.1109/IMFEDK.2011.5944844
