Abstract :
The following topics are discussed: semiconductor doping, advanced logic technologies, laser annealing, microwave annealing, rapid thermal annealing, interface engineering, diffusion, nanovoids, nanostructured materials, thermal stability, curing.
Keywords :
curing; diffusion; laser beam annealing; nanostructured materials; rapid thermal annealing; semiconductor doping; thermal stability; IEEE International Conference; advanced logic technologies; advanced thermal processing; curing; diffusion; interface engineering; laser annealing; microwave annealing; nanostructured materials; nanovoids; rapid thermal annealing; semiconductor doping; thermal stability;
