DocumentCode

2119787

Title

Low Temperature Plasma Deposition of Silicon Thin Films for Flexible Electronics

Author

Cabarrocas, P. Roca i

Author_Institution

LPICM, Ecole Polytechnique, 91128 Palaiseau, France. pere.roca@polytechnique.edu

fYear

2007

fDate

2-5 Oct. 2007

Firstpage

1

Lastpage

64

Keywords

Flexible electronics; Hydrogen; Photovoltaic cells; Plasma applications; Plasma sources; Plasma temperature; Semiconductor thin films; Silicon; Sputtering; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Thermal Processing of Semiconductors, 2007. RTP 2007. 15th International Conference on

Conference_Location

Cannizzaro, Catania, Italy

Print_ISBN

978-1-4244-1228-0

Electronic_ISBN

978-1-4244-1228-0

Type

conf

DOI

10.1109/RTP.2007.4383810

Filename

4383810