Graphical methods for robust design of a semiconductor burn-in process

Discrete-event simulation is a common tool for the analysis of semiconductor manufacturing systems. With the aid of a simulation model, and in conjunction with sensitivity analysis and metamodeling techniques, robust design can be performed to optimize a system. Robust design problems often include integer decision variables. This paper shows a graphical approach to robust design that is effective in the presence of discrete or qualitative variables. The graphical robust design methodology was applied to a backend semiconductor manufacturing process. Changes in specific resource capacities and product mix were examined to determine their effect on the level and variance of cycle time and work in process