Title :
Development of Bragg reflectors with multi-layered porous-silicon structures for optically chemical-sensing applications
Author_Institution :
Dept. of Electro-Opt. Eng., Southern Taiwan Univ. of Sci. & Technol., Tainan, Taiwan
Abstract :
Bragg reflectors with multi-layered porous silicon (MLPS) structures had been fabricated on Si substrates using an electrochemically modulation-etching technology. Analysis of reflectivity and photo-response spectra for the developed MLPS Bragg reflectors illustrated that the optical properties of these devices strongly depended on the refractive index of introduced chemical species. Experimental results showed MLPS Bragg reflectors are suitable candidates for development of optically multi-parametric chemical-sensors.
Keywords :
chemical sensors; optical elements; refractive index; spectrochemical analysis; Bragg reflector; MLPS; Si; electrochemically modulation-etching technology; multilayered porous-silicon structure; optically chemical-sensing applications; optically multiparametric chemical sensor; photo-response spectra; refractive index; Biomedical optical imaging; Chemicals; Optical device fabrication; Optical reflection; Reflectivity; Refractive index; Silicon;
Conference_Titel :
Next-Generation Electronics (ISNE), 2013 IEEE International Symposium on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-4673-3036-7
DOI :
10.1109/ISNE.2013.6512368
