DocumentCode
21270
Title
Instabilities in Capacitively Coupled Plasmas Driven by Asymmetric Trapezoidal Voltage Pulses
Author
Diomede, Paola ; Economou, Demetre J. ; Donnelly, Vincent M.
Author_Institution
Dept. of Chem. & Biomol. Eng., Univ. of Houston, Houston, TX, USA
Volume
42
Issue
10
fYear
2014
fDate
Oct. 2014
Firstpage
2822
Lastpage
2823
Abstract
Instabilities in Ar capacitively coupled plasmas driven by asymmetric trapezoidal voltage pulses were observed using particle-in-cell simulations. Despite its geometric symmetry, the discharge was electrically asymmetric. The instabilities were electron plasma waves launched from the sheath edge at the time the voltage pulse was applied and were accompanied by local electric field reversal.
Keywords
argon; discharges (electric); plasma boundary layers; plasma instability; plasma sheaths; plasma simulation; plasma waves; Ar; argon capacitively coupled plasma instabilities; asymmetric trapezoidal voltage pulses; discharge; electron plasma waves; geometric symmetry; local electric field reversal; particle-in-cell simulations; sheath edge; Discharges (electric); Electric potential; Electrodes; Electron traps; Plasma waves; Plasmas; Spatiotemporal phenomena; Plasma simulation; plasma waves;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2343639
Filename
6875919
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