• DocumentCode
    2139228
  • Title

    Contact effects on HF loss of CPW high resistivity silicon lines

  • Author

    Hu, Z.R. ; Fusco, V.F. ; Wu, Y. ; Gamble, H.G. ; Armstrong, B.M. ; Stewart, J.A.C.

  • Author_Institution
    High Frequency Electron. Lab., Queen´s Univ., Belfast, UK
  • Volume
    1
  • fYear
    1996
  • fDate
    17-21 June 1996
  • Firstpage
    299
  • Abstract
    This paper shows that the HF losses of CPW lines realized on 5-10 K/spl Omega/cm HRS (High Resistivity Silicon) substrates are strongly affected by the derivative of the I-V curves, ie. HF losses are higher where the I-V characteristic changes most rapidly. As a result the excess HF loss due to choice of quiescent bias voltage can be as high as 0.3-0.4 dB/cm. The implication of the effect is that by proper dc biasing of a CPW line on HRS substrate minimum HF loss can be achieved. This is of importance when active devices are to be biased through line interconnects.
  • Keywords
    coplanar waveguides; elemental semiconductors; losses; silicon; CPW line; HF loss; HRS substrate; I-V characteristics; Si; active devices; contact effects; high resistivity silicon; line interconnects; quiescent DC bias voltage; Conductivity; Coplanar waveguides; Gold; Hafnium; Monitoring; Ohmic contacts; Probes; Silicon; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 1996., IEEE MTT-S International
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-3246-6
  • Type

    conf

  • DOI
    10.1109/MWSYM.1996.508516
  • Filename
    508516