DocumentCode
2139228
Title
Contact effects on HF loss of CPW high resistivity silicon lines
Author
Hu, Z.R. ; Fusco, V.F. ; Wu, Y. ; Gamble, H.G. ; Armstrong, B.M. ; Stewart, J.A.C.
Author_Institution
High Frequency Electron. Lab., Queen´s Univ., Belfast, UK
Volume
1
fYear
1996
fDate
17-21 June 1996
Firstpage
299
Abstract
This paper shows that the HF losses of CPW lines realized on 5-10 K/spl Omega/cm HRS (High Resistivity Silicon) substrates are strongly affected by the derivative of the I-V curves, ie. HF losses are higher where the I-V characteristic changes most rapidly. As a result the excess HF loss due to choice of quiescent bias voltage can be as high as 0.3-0.4 dB/cm. The implication of the effect is that by proper dc biasing of a CPW line on HRS substrate minimum HF loss can be achieved. This is of importance when active devices are to be biased through line interconnects.
Keywords
coplanar waveguides; elemental semiconductors; losses; silicon; CPW line; HF loss; HRS substrate; I-V characteristics; Si; active devices; contact effects; high resistivity silicon; line interconnects; quiescent DC bias voltage; Conductivity; Coplanar waveguides; Gold; Hafnium; Monitoring; Ohmic contacts; Probes; Silicon; Substrates; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location
San Francisco, CA, USA
ISSN
0149-645X
Print_ISBN
0-7803-3246-6
Type
conf
DOI
10.1109/MWSYM.1996.508516
Filename
508516
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