DocumentCode :
2139835
Title :
Ultra-high Q silicon gyroscopes with interchangeable rate and whole angle modes of operation
Author :
Trusov, Alexander A. ; Prikhodko, Igor P. ; Zotov, Sergei A. ; Schofield, Adam R. ; Shkel, Andrei M.
Author_Institution :
Microsyst. Lab., Univ. of California, Irvine, CA, USA
fYear :
2010
fDate :
1-4 Nov. 2010
Firstpage :
864
Lastpage :
867
Abstract :
We report a new family of ultra-high Q silicon MEMS tuning fork gyroscopes demonstrating angle rate and, for the first time, rate integrating (whole angle) operation. The novel mechanical architecture eliminates low frequency in-phase modes and maximizes the Q-factors. A vacuum packaged SOI dual mass gyroscope with a 1.7 kHz operational frequency demonstrated drive- and sense- mode Q-factors of 0.31 and 0.64 million, respectively. A completely symmetric, dynamically balanced quadruple mass gyroscope with a 2.2 kHz operational frequency demonstrated identical drive- and sense-mode Q-factors of 0.45 million. Due to the stiffness and damping symmetry, the new gyroscope can be instrumented to measure the angle of rotation directly, eliminating the bandwidth and dynamic range limitations of conventional MEMS vibratory rate gyroscopes. The technology may enable silicon micromachined devices for inertial guidance applications previously limited to precision-machined quartz hemispherical resonator gyroscopes.
Keywords :
gyroscopes; micromachining; vibrations; MEMS tuning fork gyroscopes; dynamically balanced quadruple mass gyroscope; inertial guidance applications; ultra-high Q silicon gyroscopes; vacuum packaged SOI dual mass gyroscope;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
ISSN :
1930-0395
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2010.5690867
Filename :
5690867
Link To Document :
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