• DocumentCode
    2144374
  • Title

    Influence of the reactive gases nature on Ti(C,N) hard coatings in cathodic vacuum arc deposition

  • Author

    Braic, V. ; Braic, M. ; Balaceanu, M. ; Pavelescu, G.

  • Author_Institution
    Nat. Inst. for Optoelectronics, Bucharest, Romania
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    166
  • Lastpage
    169
  • Abstract
    Ti(C,N) hard coatings were prepared by the cathodic vacuum arc deposition method in a reactive atmosphere consisted of a mixture of either N2+C2H2 or N2+CH4 gases. The influence of the gas composition on the film properties (microhardness, adhesion, deposition rate, phase composition, texture) has been investigated. Optical emission spectroscopy of the reactive plasma was also performed.
  • Keywords
    microhardness; plasma deposited coatings; plasma deposition; titanium compounds; vacuum arcs; vacuum deposited coatings; vacuum deposition; Ti(C,N) hard coatings; adhesion; cathodic vacuum arc deposition method; deposition rate; film properties; gas composition; microhardness; optical emission spectroscopy; phase composition; reactive atmosphere; texture; Adhesives; Atherosclerosis; Atmosphere; Coatings; Gases; Optical films; Plasma properties; Spectroscopy; Substrates; Vacuum arcs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Discharges and Electrical Insulation in Vacuum, 2002. 20th International Symposium on
  • Print_ISBN
    0-7803-7394-4
  • Type

    conf

  • DOI
    10.1109/ISDEIV.2002.1027333
  • Filename
    1027333
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2144374