DocumentCode
2147232
Title
Thermo-electro-optical analysis of modulator embedded in all-silicon structure
Author
Zaccuri, Rocco Cristian ; Coppola, Giuseppe ; Iodice, Mario
Author_Institution
Consiglio Nazionale delle Ricerche Sezione, Istituto per la Microelettronica e Microsistemi, Napoli, Italy
fYear
2005
fDate
21-23 Sept. 2005
Firstpage
137
Lastpage
139
Abstract
Silicon is the most diffused material for microelectronic industry. We propose a thermo-electrical simulation of an integrated optical modulator realized by ion implantation in SOI wafer. This structure allows to obtain an easier integration with electronic devices.
Keywords
electro-optical modulation; elemental semiconductors; integrated optics; ion implantation; optical materials; silicon; silicon-on-insulator; thermo-optical devices; SOI wafer; Si; diffused material; integrated optical modulator; ion implantation; microelectronics; silicon; thermo-electro-optical analysis; Analytical models; Optical attenuators; Optical devices; Optical filters; Optical modulation; Optical refraction; Optical scattering; Optical variables control; Optical waveguides; Plasma waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN
0-7803-9070-9
Type
conf
DOI
10.1109/GROUP4.2005.1516430
Filename
1516430
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