Title :
Vertically coupled microring laser devices based on InP using BCB waferbonding
Author :
Hamacher, M. ; Troppenz, U. ; Heidrich, H. ; Dragoi, V.
Author_Institution :
Heinrich-Hertz-Inst., Berlin
Abstract :
In this paper, we present our approach on the realization of vertical coupling technology that has been verified for microlaser fabrication as well as for the realization of high Q resonators with ´loss-less´ cavities based on InP. The concept is based on full wafer technology and provides the integration of an optical transparent passive bus waveguide vertically coupled to the active ring laser.
Keywords :
III-V semiconductors; indium compounds; integrated optics; laser cavity resonators; micro-optics; optical fabrication; optical waveguides; ring lasers; semiconductor lasers; wafer bonding; BCB waferbonding; GaAs; InP; loss-less laser cavity resonators; microlaser fabrication; optical transparent passive bus waveguide; vertically coupled microring laser device; Costs; Epitaxial growth; Indium phosphide; Optical coupling; Optical device fabrication; Optical resonators; Optical waveguides; Resonator filters; Ring lasers; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-0931-0
Electronic_ISBN :
978-1-4244-0931-0
DOI :
10.1109/CLEOE-IQEC.2007.4385912
