Highly Compact Micro-Machined Coplanar Bandpass Filter

Highly compact micro-machined coplanar bandpass filters based on end-coupled half-wavelength and quarter-wavelength resonators topologies have been investigated. Simple gap and interdigitated capacitive discontinuities have been modeled through an appropriate technique and have been implemented in order to achieve low loss and narrow bandpass membrane micromachined filters. Excellent performances, similar to the state of the art, together with an important improvement in term of compactness have been achieved.