• DocumentCode
    2156239
  • Title

    Design of monolithic BiCMOS open-loop detection circuit for MEMS capacitance accelerometer

  • Author

    Wang, Yuesheng ; Xu, Shiliu ; Liu, Luncai ; Li, Kaicheng

  • Author_Institution
    Coll. of Opto-Electron. Eng., Chongqing Univ., Chongqing, China
  • fYear
    2008
  • fDate
    20-23 Oct. 2008
  • Firstpage
    2448
  • Lastpage
    2451
  • Abstract
    A novel monolithic BiCMOS open-loop detection circuit for capacitive MEMS accelerometers was presented. It has been developed in 2 ¿m CMOS process. The tested results were as follows. Noise was 1 mg/¿Hz, power was smaller than 10 mW, supply voltage was as low as 5 V, and there is a 2-pole filter on chip.
  • Keywords
    BiCMOS integrated circuits; accelerometers; capacitive sensors; detector circuits; filters; integrated circuit design; integrated circuit noise; microsensors; 2-pole filter; CMOS process; capacitive MEMS accelerometers; monolithic BiCMOS open-loop detection circuit; noise; supply voltage; voltage 5 V; Acceleration; Accelerometers; BiCMOS integrated circuits; Capacitance; Circuit noise; Clocks; Frequency conversion; Micromechanical devices; Signal to noise ratio; Voltage; BiCMOS; capacitance accelerometer; detection circuit; open-loop;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-2185-5
  • Electronic_ISBN
    978-1-4244-2186-2
  • Type

    conf

  • DOI
    10.1109/ICSICT.2008.4735067
  • Filename
    4735067
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2156239