Fabrication of novel cantilever with nanotip for AFM applications

Author

Li, Li ; Han, Xiang ; Wu, Wengang ; Ding, Fei ; Chen, Qinghua

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing, China

fYear

2008

fDate

20-23 Oct. 2008

Firstpage

2383

Lastpage

2386

Abstract

As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM), we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips with well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in the fabrication process. The tips on the cantilever, with 1.2 Â¿m height, have a high aspect ratio of 7:1. This nanotip on the cantilevers can not only be used as an AFM probe, it can also be extended to any two-dimensional nanotip arrays to be widely used in biomedical field such as biomedical specimen micro-extractions and transportations.

Keywords

atomic force microscopy; cantilevers; etching; nanotechnology; AFM probe; atomic force microscopy; biomedical field; biomedical specimen microextractions; cantilever; etching time; high aspect ratio; nanotips; transportations; Anisotropic magnetoresistance; Atomic force microscopy; Dry etching; Fabrication; Force sensors; Head; Lithography; Probes; Space technology; Transportation; Atomic force microscopy; Cantilever; High-aspect-ratio; Nanotip; Spacer technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2185-5

Electronic_ISBN

978-1-4244-2186-2

Type

conf

DOI

10.1109/ICSICT.2008.4735072

Filename

4735072