Title :
Table of contents
Abstract :
The following topics are dealt with: optical MEMS; nanophotonics; image sensor; electrostatic actuation; lenses; lasers; micromirrors; waveguides; biooptics; and THz applications.
Keywords :
bio-optics; electrostatics; image sensors; lasers; lenses; micro-optomechanical devices; micromirrors; microwave photonics; nanophotonics; optical waveguides; THz applications; biooptics; electrostatic actuation; image sensor; lasers; lenses; micromirrors; nanophotonics; optical MEMS; waveguides;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659027
