DocumentCode
2162833
Title
A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners
Author
Maruyama, Shoichi ; Konishi, Tsuyoshi ; Machida, Kenji ; Ishihara, Noboru ; Masu, Kazuya ; Fujita, Hideaki ; Toshiyoshi, Hiroshi
Author_Institution
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
fYear
2013
fDate
18-22 Aug. 2013
Firstpage
21
Lastpage
22
Abstract
We report an interface IC (integrated circuit) to electrostatically drive and measure the tilt-mirror angle by switching the actuator´s port to either the driver or charge-sensing circuit in a time-multiplex manner in a period shorter than the mechanical response time to minimize the disturbance of sensing.
Keywords
electrostatic actuators; integrated optoelectronics; micro-optomechanical devices; micromirrors; microsensors; optical scanners; optical sensors; optical switches; MEMS optical scanners; actuator port switching; charge-sensing circuit; interface IC; interface integrated circuit; tilt-mirror angle; time-multiplexed electrostatic drive; Actuators; Drives; Integrated circuits; Micromechanical devices; Mirrors; Sensors; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location
Kanazawa
ISSN
2160-5033
Print_ISBN
978-1-4799-1512-5
Type
conf
DOI
10.1109/OMN.2013.6659039
Filename
6659039
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