Title :
High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing
Author :
Jae-Woong Jeong ; Park, Bong-Ryeol ; Hohyun Keum ; Seok Kim ; Rogers, John A. ; Solgaard, Olav
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.
Keywords :
elemental semiconductors; integrated optics; micromechanical devices; micromirrors; nanophotonics; optical design techniques; photonic crystals; reflectivity; silicon; Si; high-reflectivity broadband monolithic silicon photonic crystal mirrors; integrated optics; nanophotonic devices; optical design; polarization dependence; transfer printing; two-axis electrostatic MEMS scanner; wavelength 1490 nm to 1505 nm; wavelength 1550 nm to 1570 nm; Fabrication; Micromechanical devices; Mirrors; Optical polarization; Optical reflection; Printing; Reflectivity;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659040
