DocumentCode :
2162967
Title :
High contrast, cryogenic, large micromirror array for multi-object spectroscopy
Author :
Zamkotsian, Frederic ; Canonica, Michael ; Lanzoni, Patrick ; Noell, Wilfried
Author_Institution :
Lab. d´Astrophys. de Marseille, Marseille, France
fYear :
2013
fDate :
18-22 Aug. 2013
Firstpage :
25
Lastpage :
26
Abstract :
Next generation of multi-object spectrographs (MOS) in astronomy will use MEMS-based programmable slit masks. Large micromirror arrays with 2048 tiltable micromirrors were fabricated using bulk and surface micro-machining, and wafer level bonding for the assembly. Micromirror size is 100μm × 200 μm and they exhibit very good surface flatness. Mirror architecture as well as a large mechanical tilt angle of 25° lead to a high contrast device, in the order of 1000:1, large enough for objects and background rejection in the MOS field of view. Finally, the micromirrors could be successfully actuated before, during and after cryogenic cooling at 162K.
Keywords :
astronomical instruments; cryogenics; infrared spectroscopy; micro-optomechanical devices; micromachining; micromirrors; optical arrays; optical fabrication; wafer bonding; MEMS-based programmable slit masks; assembly; astronomy; bulk micromachining; cryogenic cooling; high contrast device; high contrast large micromirror array; mechanical tilt angle; micromirror size; mirror architecture; multiobject spectroscopy; surface flatness; surface micromachining; temperature 162 K; tiltable micromirrors; wafer level bonding; Arrays; Cryogenics; Instruments; Micromirrors; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
ISSN :
2160-5033
Print_ISBN :
978-1-4799-1512-5
Type :
conf
DOI :
10.1109/OMN.2013.6659041
Filename :
6659041
Link To Document :
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