Title :
Assembly of 3D MEMS mirrors and scanners using compliant push pads
Author :
Yi Chiu ; Yan-Ting Wu ; Hao-Chiao Hong
Author_Institution :
Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.
Keywords :
micro-optomechanical devices; micromirrors; optical scanners; 3D MEMS mirrors; 3D MEMS scanners; 3D microstructures; assembled structures; assembly technique; compliant push pads; micromirrors; microprobe; microscanners; Assembly; Mirrors; Optical device fabrication; Probes; Stress; Three-dimensional displays;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659042