DocumentCode :
2162984
Title :
Assembly of 3D MEMS mirrors and scanners using compliant push pads
Author :
Yi Chiu ; Yan-Ting Wu ; Hao-Chiao Hong
Author_Institution :
Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear :
2013
fDate :
18-22 Aug. 2013
Firstpage :
27
Lastpage :
28
Abstract :
This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.
Keywords :
micro-optomechanical devices; micromirrors; optical scanners; 3D MEMS mirrors; 3D MEMS scanners; 3D microstructures; assembled structures; assembly technique; compliant push pads; micromirrors; microprobe; microscanners; Assembly; Mirrors; Optical device fabrication; Probes; Stress; Three-dimensional displays;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
ISSN :
2160-5033
Print_ISBN :
978-1-4799-1512-5
Type :
conf
DOI :
10.1109/OMN.2013.6659042
Filename :
6659042
Link To Document :
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