Title :
High sensitive silicon optical index sensor based on Ring-assisted Mach-Zehnder interferometer
Author :
Tianhang Zhang ; Bo Li ; Chong Pei Ho ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
This paper demonstrated the design and fabrication of Ring-assisted Mach-Zehnder interferometer (RA-MZI) based optical sensor. The measurement result shows a free spectrum range (FSR) of 5 nm and a highest Q-factor of 2000. Finite difference time domain (FDTD) simulation result shows a sensitivity of 137.5 nm/RIU for sensing ambient refractive index (RI) change.
Keywords :
Mach-Zehnder interferometers; Q-factor; elemental semiconductors; finite difference time-domain analysis; optical design techniques; optical fabrication; optical sensors; refractive index; silicon; FDTD simulation; Q-factor; Si; ambient refractive index change sensing; finite difference time domain simulation; free spectrum range; high sensitive silicon optical index sensor; optical design; optical fabrication; ring-assisted Mach-Zehnder interferometer; wavelength 5 nm; Biomedical optical imaging; Optical device fabrication; Optical interferometry; Optical sensors; Optical waveguides; Sensitivity; Ring-assisted Mach-Zehnder interferometer; integrated optical sensors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659093
