Title :
Fabrication and measurements using ultra-tall near-field coaxial tips
Author :
Wang, Yaqiang ; Paulson, Charles A. ; Ning, Guoqing ; Van der Weide, Daniel W.
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
Abstract :
We present a new method for microfabrication of coaxial silicon tips with heights >50 μm. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.
Keywords :
atomic force microscopy; coaxial waveguides; silicon; sputter etching; HP8753D network analyzer; Si; atomic force microscopy; coaxial silicon tips; deep reactive ion etching; microelectromechanical systems; microfabrication method; microwave measurements; scanning near-field microwave microscopy; ultra-tall near-field coaxial tips; Antenna measurements; Atomic force microscopy; Atomic measurements; Coaxial components; Fabrication; Force measurement; Microwave measurements; Performance evaluation; Semiconductor device measurement; Silicon;
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
Print_ISBN :
0-7803-8845-3
DOI :
10.1109/MWSYM.2005.1517174
