Title :
1997 International Semiconductor Conference 20th Edition. CAS ´97 Proceedings
Abstract :
The following topics were dealt with: materials; integrated circuits; semiconductor devices; microsystem technology; porous silicon; semiconductor physics; process characterization; technology; reliability; microwaves; optoelectronics; sensors; applications
Keywords :
semiconductors; applications; integrated circuits; microsystem technology; microwaves; optoelectronics; porous silicon; process characterization; reliability; semiconductor devices; semiconductor materials; semiconductor physics; sensors; technology;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia, Romania
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651540
