DocumentCode
2168189
Title
Vibrating wheel micromechanical gyro
Author
Greiff, Paul ; Antkowiak, Bernard ; Campbell, James ; Petrovich, Anthony
Author_Institution
Charles Stark Draper Lab. Inc., Cambridge, MA, USA
fYear
1996
fDate
22-26 Apr 1996
Firstpage
31
Lastpage
37
Abstract
Silicon micromechanical gyro performance has progressed to the threshold of useful initial applications, at least 1 deg/s. The vibrating wheel on a gimbal (VWOG) is a new gyro design with the promise of improved manufacturability. With a variety of accelerometers from which to choose, the advent of the silicon gyro begins the era of silicon micromechanical inertial guidance
Keywords
accelerometers; elemental semiconductors; gyroscopes; micromechanical devices; silicon; Si; VWOG; accelerometers; gimbal; inertial guidance; manufacturability; micromechanical gyro; vibrating wheel; Accelerometers; Electrodes; Etching; Fabrication; Instruments; Laboratories; Large-scale systems; Micromechanical devices; Silicon; Wheels;
fLanguage
English
Publisher
ieee
Conference_Titel
Position Location and Navigation Symposium, 1996., IEEE 1996
Conference_Location
Atlanta, GA
Print_ISBN
0-7803-3085-4
Type
conf
DOI
10.1109/PLANS.1996.509053
Filename
509053
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