DocumentCode :
2170085
Title :
Model for MEMS Switches Power Handling and Phase Noise
Author :
Mercier, D. ; Blondy, P. ; Barataud, D. ; Cros, D. ; Guillon, P. ; Champeaux, C. ; Tristant, P. ; Catherinot, A.
Author_Institution :
IRCOM, Faculté des sciences, 123 av. A. Thomas 87060 LIMOGES cedex - FRANCE. mercier@ircom.unilim.fr
fYear :
2002
fDate :
23-26 Sept. 2002
Firstpage :
1
Lastpage :
4
Abstract :
This paper focus on an electromechanical model for the MEMS varactors based on electrical/mechanical equivalencies. It allows the MEMS varactors capacitance computation and take into account MEMS power handling and phase noise due to Brownian noise. It has been validated with measurements on a shunt MEMS varactor but it can be extend to a wide range of MEMS components.
Keywords :
Biomembranes; Capacitance; Equations; Micromechanical devices; Microswitches; Phase noise; Radio frequency; Switches; Varactors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Conference, 2002. 32nd European
Conference_Location :
Milan, Italy
Type :
conf
DOI :
10.1109/EUMA.2002.339266
Filename :
4140346
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2170085
بازگشت