DocumentCode
2170290
Title
Modeling tool failures in semiconductor fab simulation
Author
Rose, Oliver
Author_Institution
Inst. of Comput. Sci., Wurzburg Univ., Germany
Volume
2
fYear
2004
fDate
5-8 Dec. 2004
Firstpage
1910
Abstract
In this research, we investigate how well Weibull, Gamma, and special bimodal distribution are suited as an alternative to the exponential distribution approach in the stochastic modeling of machine downtimes and times between failures. We also discuss the question whether sampling shop-floor data should not only include first order statistics, but also measures that allow to monitor and model the variability of the equipment and processes and even the correct distribution of the data.
Keywords
digital simulation; exponential distribution; production equipment; semiconductor device manufacture; stochastic processes; bimodal distribution; data distribution; exponential distribution; machine downtimes; sampling shop-floor data; semiconductor fab simulation; statistics; stochastic modeling; tool failures; Computational modeling; Computer science; Computer simulation; Context modeling; Equipment failure; Histograms; Production facilities; Shape; Stochastic processes; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference, 2004. Proceedings of the 2004 Winter
Print_ISBN
0-7803-8786-4
Type
conf
DOI
10.1109/WSC.2004.1371548
Filename
1371548
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