Title :
Electromagnetic modeling of non-uniform serpentine flexure based RF-MEMS switch
Author :
Sharma, Arvind Kumar ; Gupta, Neeraj
Author_Institution :
Dept. of Electr. & Electron. Eng., Birla Inst. of Technol. & Sci. Pilani, Pilani, India
Abstract :
This paper presents electromagnetic modeling of Non-uniform serpentine flexure based RF-MEMS switch. The Radio Frequency (RF) performance of the RF MEMS switch is obtained by scattering parameters (Insertion loss, Return loss and Isolation) which are mainly dominated by down state to upstate capacitance ratio and MEMS bridge geometries. This RF MEMS switch results in low insertion loss of -0dB to -0.3dB with considerable isolation of more than -40dB at 10-50 GHz in unactuated and actuated states of MEMS bridge.
Keywords :
electromagnetic wave scattering; microswitches; microwave switches; Insertion loss; MEMS bridge geometries; RF-MEMS switch; down state; electromagnetic modeling; frequency 10 GHz to 50 GHz; isolation; nonuniform serpentine flexure; radiofrequency performance; return loss; scattering parameters; unactuated state; upstate capacitance ratio; Bridge circuits; Capacitance; Insertion loss; Micromechanical devices; Microswitches; Radio frequency; RF MEMS; electromagnetic model; scattering parameters;
Conference_Titel :
Advanced Electronic Systems (ICAES), 2013 International Conference on
Conference_Location :
Pilani
Print_ISBN :
978-1-4799-1439-5
DOI :
10.1109/ICAES.2013.6659420
