Ka-Band, MEMS Switched Line Phase Shifters Implemented in Finite Ground Coplanar Waveguide

Ka-band MEMS switched line one and two-bit phase shifters implemented in finite ground coplanar waveguide on High Resistivity Silicon (HRS) substrates are presented. The phase shifters are constructed of two single-pole double-throw (SPDT) switches with additional reference and phase offset transmission line lengths. The MEMS devices are doubly anchored cantilever beam capacitive switches with inductive sections (MEMS LC phase shifters have a minimum insertion loss (IL) and a maximum return loss (RL) of 0.85 dB and 30 dB and 1.8 dB and 25 dB respectively. The one-bit phase shifter´s designed phase shift is 22.5° and actual measured phase shift is 21.8° at 26.5 GHz. The two-bit phase shifter´s designed phase shift is 22.5°, 45°, and 67.5° and the actual measured phase shifts are 21.4°, 44.2°, and 65.8°, respectively, at 26.5 GHz.