Title :
Proceedings 2002 IEEE Hong Kong Electron Devices Meeting (Cat. No.02TH8616)
Keywords :
actuators; dielectric materials; integrated circuit modelling; integrated circuit technology; optoelectronic devices; semiconductor device models; semiconductor technology; sensors; actuators; dielectric materials; electron devices; fabrication technologies; integrated circuit modelling; monolithic integrated circuits; optoelectronics; semiconductor device models; sensors; simulation; solid-state circuits;
Conference_Titel :
Electron Devices Meeting, 2002. Proceedings. 2002 IEEE Hong Kong
Conference_Location :
Hong Kong, China
Print_ISBN :
0-7803-7429-0
DOI :
10.1109/HKEDM.2002.1029166