Superconducting magnet program for X-ray lithography source at Brookhaven National Laboratory

Author

Hsieh, H. ; Blumberg, R. ; Heese, R. ; Murphy, J. ; Pjerov, S. ; Sharma, S. ; Leung, E.M.W. ; Kalsi, S. ; Reusch, M.F.

Author_Institution

Brookhaven Nat. Lab., Upton, NY, USA

fYear

1991

fDate

6-9 May 1991

Firstpage

2248

Abstract

Brookhaven National Laboratory is developing a compact electron storage ring to be used as an X-ray source for producing high-density computer chips. The circumference of this machine is 8.5 m, the machine lattice consists of four quadrupoles, two sectupoles, and a pair of air-core combined function 3.87 T superconducting dipoles. The authors describe the field characteristics and engineering realization of these magnets and present the current status of the program.<>

Keywords

beam handling equipment; storage rings; superconducting magnets; Brookhaven National Laboratory; X-ray lithography source; X-ray source; air-core combined function 3.87 T superconducting dipoles; compact electron storage ring; high-density computer chips; machine lattice; quadrupoles; sectupoles; superconducting magnets; Assembly; Collaboration; Electrons; Laboratories; Lattices; Storage rings; Superconducting coils; Superconducting magnets; Synchrotrons; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Particle Accelerator Conference, 1991. Accelerator Science and Technology., Conference Record of the 1991 IEEE

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-0135-8

Type

conf

DOI

10.1109/PAC.1991.164929

Filename

164929