DocumentCode
2186325
Title
The silicon (220) lattice spacing: analysis of a new measurement
Author
Basile, G. ; Bergamin, A. ; Cavagnero, G. ; Mana, G. ; Vittone, E. ; Zosi, G.
Author_Institution
Istituto di Metrol. G. Colonnetti, CNR, Torino, Italy
fYear
1994
fDate
June 27 1994-July 1 1994
Firstpage
337
Lastpage
338
Abstract
A new experiment has been run for the past year at the IMGC to measure the (220) lattice spacing in silicon by X-ray/optical/interferometry. The data so far collected show that the experiment is capable of 5/spl times/10/sup -9/ resolution. A new determination of silicon d/sub 220/ is reported.<>
Keywords
X-ray applications; lattice constants; light interferometry; silicon; Si; X-ray interferometry; d/sub 220/ constant; optical interferometry; semiconductor materials; Atom optics; Displacement measurement; Error correction; Lattices; Nanotechnology; Neutrons; Optical feedback; Optical interferometry; Optical noise; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location
Boulder, CO, USA
Print_ISBN
0-7803-1984-2
Type
conf
DOI
10.1109/CPEM.1994.333371
Filename
333371
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