Influence of post heat treatment to the properties of ZnO thin film prepared by RF magnetron sputtering

Author

Md Sin, N.D. ; Abdul Aziz, Azlan ; Ahmad, Sahar ; Musa, M.Z. ; Mamat, M.H. ; Rusop, M.

Author_Institution

NANO-Electron. Centre, Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia

fYear

2012

fDate

5-6 Dec. 2012

Firstpage

88

Lastpage

91

Abstract

The influence of post heat treatment on ZnO thin films prepared by RF magnetron sputtering was reported. The effect of ZnO thin films post heat treatment were varies from 300°C to 550°C had been investigated. The thin films were examined using two point probe current-voltage (I-V) measurement (Keithley 2400), UV-Vis-NIR spectrophotometer, field emission scanning electron microscopy (FESEM) (JEOL JSM 7600F). The current-voltage (I-V) measurements indicated that the conductivity of post heat treatment temperature of 500°C give the optimum conductivity. All films exhibited high UV absorption (300~380nm) properties and had low absorbance in visible and near infrared (IR) (380~1200nm) region that obtained from UV-Vis-NIR spectrophotometer measurement. The observed image from FESEM shows an increase of the nanocolumnar size, as the post heat treatment increases.

Keywords

II-VI semiconductors; electrical conductivity; field emission electron microscopy; heat treatment; infrared spectra; scanning electron microscopy; semiconductor growth; semiconductor thin films; sputter deposition; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; FESEM; RF magnetron sputtering; UV absorption properties; UV-vis-nir spectrophotometer measurement; ZnO; ZnO thin film preparation; current-voltage measurements; electrical conductivity; field emission scanning electron microscopy; heat treatment; nanocolumnar size; near infrared region; point probe current-voltage measurement; temperature 300 degC to 550 degC; thin film properties; visible region; wavelength 300 nm to 1200 nm; ZnO thin films; electrical properties; optical properties; post heat treatment; structural properties;

fLanguage

English

Publisher

ieee

Conference_Titel

Research and Development (SCOReD), 2012 IEEE Student Conference on

Conference_Location

Pulau Pinang

Print_ISBN

978-1-4673-5158-4

Type

conf

DOI

10.1109/SCOReD.2012.6518617

Filename

6518617