Title :
Coplanar on-wafer matching structures tunable by RF-probe position
Author_Institution :
Watkins-Johnson Co., Palo Alto, CA, USA
Abstract :
On-wafer coplanar matching structures have been designed and fabricated that are tunable by RF-probe position. They are particularly suited for input matching FETs and overcome the matching problem caused by RF-probe attenuation. The approximate size at 18 GHz is 1 mm.<>
Keywords :
MMIC; impedance matching; integrated circuit testing; microstrip components; microwave measurement; probes; tuning; 1 mm; 18 GHz; FET input matching; RF-probe attenuation; RF-probe position; coplanar on-wafer structures; onwafer coplanar matching structures; Attenuation; FETs; Impedance matching;
Conference_Titel :
Microwave Symposium Digest, 1994., IEEE MTT-S International
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-1778-5
DOI :
10.1109/MWSYM.1994.335295
