DocumentCode
2194063
Title
High Q inductors for MCM-Si technology
Author
Klemmer, Nikolaus ; Hartung, Jürgen
Author_Institution
Ericsson Res. & Dev., Research Triangle Park, NC, USA
fYear
1997
fDate
4-5 Feb 1997
Firstpage
33
Lastpage
37
Abstract
Spiral inductors for microwave applications have been integrated on a silicon substrate in Multi Chip Module (MCM) technology. The fabricated inductors exhibit quality factors of up to 23. To the authors knowledge, these are the highest values for inductors on silicon reported so far. A software tool has been developed for fast and accurate design of planar spiral inductors
Keywords
Q-factor; inductors; microwave integrated circuits; multichip modules; silicon; MCM-Si technology; Si; design; microwave applications; multi chip module; planar spiral inductor; quality factor; silicon substrate; software tool; Application software; Conductivity; Costs; Frequency; Inductance; Q factor; Silicon; Spirals; Substrates; Thin film inductors;
fLanguage
English
Publisher
ieee
Conference_Titel
Multi-Chip Module Conference, 1997. MCMC '97., 1997 IEEE
Conference_Location
Santa Cruz, CA
Print_ISBN
0-8186-7789-9
Type
conf
DOI
10.1109/MCMC.1997.569342
Filename
569342
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