DocumentCode
2195685
Title
Design and Performance of a PZT Coriolis Vibrating Gyro (CVG)
Author
Parent, Arnaud ; Traon, Oliver Le ; Masson, Steve ; Foulgoc, Baptiste Le
Author_Institution
Sensors & Microtechnol. Unit, Chatillon
fYear
2006
fDate
July 30 2006-Aug. 3 2006
Firstpage
216
Lastpage
219
Abstract
A new piezoelectric Coriolis vibrating gyro (CVG) is presented in this article. There is a real need for integrated inertial sensors (e.g. for vehicle attitude control or inertial navigation) and ONERA (the French National Establishment for Aerospace Research) has been developing a quartz micromachined CVG called VIG (vibrating inertial gyro). Quartz was chosen in regard to its mechanical quality and temperature stability, but nevertheless the sensor resolution is limited by its low piezoelectric properties. To enhance CVG performances one possibility is to use stronger piezoelectric material (since the resolution is directly linked to piezoelectricity the material performance). As Perovskite ferroelectric materials are strongly piezoelectric - PZT ceramics (d31=150pC/N) are hundreds of times more piezoelectric than quartz (d11=2.3pC/N) -they offer new possibilities in CVG development. In this paper are presented the design, the performance and the resolution of a new monolithic piezoelectric CVG made of a PZT ceramic. Such a gyro could achieve a resolution of 0.2 deg/h. A brief discussion of key intrinsic material parameters is also made.
Keywords
Coriolis force; ferroelectric materials; gyroscopes; piezoelectric materials; vibrations; PZT; PZT Coriolis vibrating gyro; Perovskite ferroelectric materials; integrated inertial sensors; mechanical quality; piezoelectric material; quartz micromachined Coriolis vibrating gyro; temperature stability; vibrating inertial gyro; Aerospace control; Aerospace materials; Ceramics; Ferroelectric materials; Inertial navigation; Mechanical sensors; Piezoelectric materials; Stability; Temperature sensors; Vehicles; CVG; Ferroelectrics; Gyro; Inertial; MEMS; Sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of ferroelectrics, 2006. isaf '06. 15th ieee international symposium on the
Conference_Location
Sunset Beach, NC
ISSN
1099-4734
Print_ISBN
978-1-4244-1331-7
Electronic_ISBN
1099-4734
Type
conf
DOI
10.1109/ISAF.2006.4387870
Filename
4387870
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