Relaxor Ferroelectric 0.2PZN-0.8PZT(53/47) Thick Films Fabricated Using a MOD Process

Author

He, Xi-yun ; Zheng, Xinsen ; Qiu, Pinsun ; Cheng, Wenxiu ; Ding, Aili

Author_Institution

Chinese Acad. of Sci., Shanghai

fYear

2006

fDate

July 30 2006-Aug. 3 2006

Firstpage

332

Lastpage

335

Abstract

Crack free peroviskite 0.2PZN-0.8PZT (53/47) thick films up to 6.8 mum were prepared by a metallic-organic decomposition (MOD) process on platinum coated titanium (Pt/Ti) foil substrates by a dipping coating technique. The thick film exhibits a pure perovskite phase structure with dense and uniform microstructure. The dielectric, ferroelectric and piezoelectric properties of the thick film have been examined and discussed. A perfect ferroelectric P-E loop was observed. The efficient piezoelectric coefficient d_33,f of the film was estimated by a standard Berlincourt type meter. The measured d_33,f value of the 0.2PZN-0.8PZT (53/47) thick film is about 177 pC/N; it is larger than that of the PZT (53/47) thick film examined in the same condition, 98 pC/N. This 0.2PZN-0.8PZT (53/47) thick film promises a good application in the microelectronic devices.

Keywords

dip coating; ferroelectric thin films; lead compounds; piezoelectricity; relaxor ferroelectrics; thick films; zinc compounds; MOD process; PZN-PZT thick film; PbZnO₃NbO₃-PZT; PtTi; crack free peroviskite thick films; dense microstructure; dielectric properties; dipping coating; ferroelectric P-E loop; ferroelectric properties; metallic-organic decomposition process; perovskite phase structure; piezoelectric coefficient; piezoelectric properties; platinum coated titanium foil; relaxor ferroelectric; standard Berlincourt type meter; thick film fabrication; Coatings; Dielectric substrates; Ferroelectric films; Ferroelectric materials; Microstructure; Piezoelectric films; Platinum; Relaxor ferroelectrics; Thick films; Titanium; MOD process; PZN-PZT thick film; Pt/Ti foil substrate; dip-coating technique;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of ferroelectrics, 2006. isaf '06. 15th ieee international symposium on the

Conference_Location

Sunset Beach, NC

ISSN

1099-4734

Print_ISBN

978-1-4244-1331-7

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2006.4387899

Filename

4387899