High Precision Formation for Two-Photon 3D Microfabrication

Two-photon 3D microfabrication has become one research focus in MEMS field. The main factors influencing the fabrication precision are discussed in this paper. One factor is decided by the characteristics of the two-photon polymerization, includes the power of the femtosecond (fs) laser, the exposing time and the overlap ratio, etc. The other is mainly induced by the movement error of machining system. According to these factors, the high precision formation mechanism is proposed. Through experiment and theory analysis, the machining process parameters are optimized. In order to compensate the movement error of the scanning stage, a vision monitoring system based on image process and pattern recognition is developed. The experiment results show the availability of these methods.