DocumentCode
2200883
Title
Hybrid Methodology for Development of MEMS
Author
Pryputniewicz, Ryszard J. ; Marinis, Ryan T. ; Klempner, Adam R. ; Hefti, Peter
fYear
2006
fDate
April 25-27, 2006
Firstpage
606
Lastpage
613
Keywords
Fabrication; Failure analysis; Marine technology; Mechanical engineering; Micromechanical devices; Packaging; Software tools; Telephony; Testing; Visualization;
fLanguage
English
Publisher
ieee
Conference_Titel
Position, Location, And Navigation Symposium, 2006 IEEE/ION
Print_ISBN
0-7803-9454-2
Type
conf
DOI
10.1109/PLANS.2006.1650651
Filename
1650651
Link To Document