• DocumentCode
    2201298
  • Title

    Investigation of on-chip high temperature annealing of PMOS dosimeters

  • Author

    Kelleher, Ann ; Lane, William ; Adams, Leonard

  • Author_Institution
    Nat. Microelectron. Res. Centre, Cork, Ireland
  • fYear
    1995
  • fDate
    18-22 Sep 1995
  • Firstpage
    465
  • Lastpage
    469
  • Abstract
    Radiation sensitive pMOS dosimeters can measure only to a maximum dose which is determined by the type, sensitivity and irradiation conditions of the RADFET. On reaching the maximum dose, the dosimeters normally have to be replaced. The aim of this work is to study the feasibility of using on-chip poly-resistor heaters to anneal the dosimeters back to their pre-irradiation threshold voltage. This study shows that on-chip heating is a viable option to achieve post-irradiation annealing, and that the fading characteristics obtained agree with those of oven annealing from a previous study which was carried out on the NMRC RADFETs
  • Keywords
    MOSFET; annealing; dosimeters; semiconductor counters; RADFET; fading; high temperature annealing; on-chip poly-resistor heater; radiation sensitive pMOS dosimeter; threshold voltage; Annealing; Microelectronics; Ovens; Plasma temperature; Resistors; Semiconductor device measurement; Space heating; Space vehicles; Temperature sensors; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Radiation and its Effects on Components and Systems, 1995. RADECS 95., Third European Conference on
  • Conference_Location
    Arcachon
  • Print_ISBN
    0-7803-3093-5
  • Type

    conf

  • DOI
    10.1109/RADECS.1995.509821
  • Filename
    509821