High pressure glow discharges based on MSE arrays

Summary form only given. A source of large area, high pressure glow discharges based on three-dimensional micro-structure electrode (MSE) arrays is presented. These structures consist of a regular matrix of holes perforated in a thin composite sheet made out of two metallic foils separated by an insulator. The opening of the holes can vary between 70 /spl mu/m and 500 /spl mu/m, a typical value being 100 /spl mu/m. The distance between holes is 140 /spl mu/m to 3000 /spl mu/m. Different metals (Cr, Pt, Cu) with thickness up to 100 /spl mu/m were used as electrodes. The insulator layer is made out of glass or Kapton, 350 /spl mu/m respectively 50 /spl mu/m thick. Stable direct current glow discharges were produced in noble gases (Ar, Ne, He) and air over a wide pressure range (hundreds of mbar up to one atmosphere). Single hole discharges and groups of parallel operated holes (up to 50) have been investigated. Current-voltage characteristics and the optical emission of the glow discharge were studied. Discharge currents in the range of 0.1 to 20 mA at applied voltages less than 1kV were measured. The estimated electron density in the discharge is on the order of 10/sup 11/-10/sup 12/ cm/sup -3/. Spectroscopic investigations of the emitted radiation were performed on neon and argon dc-discharges. These discharges are intense sources of visible and UV-radiation.