Title :
Computation and measurement of electron circulation patterns in phase space
Author :
Kortshagen, U. ; Heil, B.
Author_Institution :
Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA
Abstract :
Summary form only given. We present numerical results and measurements of electron fluxes in phase space in a low-pressure inductively coupled plasma (ICP). Numerical results were obtained with a two-dimensional plasma model which resolves the ICP structure in radial and axial directions. The electron Boltzmann equation is solved for this spatially two-dimensional problem in the two-term and the effective field approximation. The electron flux pattern at constant energy are obtained from the anisotropy component of the electron distribution function (EDF). Measurement of the EDF were performed with a Langmuir probe mechanism.
Keywords :
plasma simulation; plasma transport processes; ICP structure; Langmuir probe mechanism; anisotropy component; axial direction; effective field approximation; electron Boltzmann equation; electron circulation patterns; electron distribution function; electron flux pattern; electron fluxes; low-pressure inductively coupled plasma; numerical results; phase space; radial direction; two-dimensional plasma model; two-term approximation; Anisotropic magnetoresistance; Boltzmann equation; Distribution functions; Electrons; Energy resolution; Extraterrestrial measurements; Performance evaluation; Phase measurement; Plasma measurements; Spatial resolution;
Conference_Titel :
Plasma Science, 2000. ICOPS 2000. IEEE Conference Record - Abstracts. The 27th IEEE International Conference on
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-5982-8
DOI :
10.1109/PLASMA.2000.854867
