Title :
New Methods for Calibrated Scanning Thermal Microscopy (SThM)
Author :
Dobson, Phillip S. ; Weaver, John M R ; Mills, Gordon
Author_Institution :
Univ. of Glasgow, Glasgow
Abstract :
A batch microfabricated scanning thermal microscopy (SThM) probe is presented. The sensor, based on a Pd resistance thermometer is shown to be suitable for calibration and stable for very long periods (> 700 hours). A technique for achieving transformer isolation of the SThM probe is described and shown to be a highly effective route to obtaining calibrated SThM scans of electrically sensitive samples as well as those subject to large bias voltages.
Keywords :
calibration; thermometers; Pd resistance thermometer; SThM probe; batch microfabricated scanning thermal microscopy; calibrated scanning thermal microscopy; transformer isolation; Atomic force microscopy; Calibration; Fabrication; Probes; Schottky diodes; Sensor phenomena and characterization; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388498
