• DocumentCode
    2207288
  • Title

    Analytical threshold voltage model for ultrathin SOI MOSFET´s

  • Author

    Xin-Yu, Liu ; Hai-Feng, Sun ; De-xin, Wu

  • Author_Institution
    Microelectron. R&D Center, Chinese Acad. of Sci., China
  • Volume
    1
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    555
  • Abstract
    The threshold voltage of fully depleted silicon-on-insulator (SOI) MOSFET with channel lengths down to the deep-submicrometer range has been investigated. By applying Gauss´s law, a quasi-two-dimensional analytical threshold voltage model for ultra-thin SOI fully depleted MOSFET´s including the short-channel effect (SCE) is achieved. Furthermore, we consider further the threshold voltage of FDSOI MOSFET and in particular the value of the surface potential at threshold. It is shown that the surface potential at FDSOI MOSFET threshold may differ significantly from 2 φ i. We extend this model by accounting for surface potential about P+ poly-silicon gate, a closed form expression for the threshold voltage is obtained and compared with experimental data for several SOI FD MOSFET´s
  • Keywords
    MOSFET; semiconductor device models; silicon-on-insulator; surface potential; FDSOI MOSFET; Gauss´s law; P+ poly-silicon gate; SCE; Si; closed form expression; deep-submicrometer channel length; quasi-two-dimensional analytical threshold voltage model; short-channel effect; surface potential; ultra-thin SOI fully depleted MOSFET; ultrathin SOI MOSFET; Analytical models; Gaussian channels; Gaussian processes; MOSFET circuits; Microelectronics; Silicon on insulator technology; Sun; Surface fitting; Threshold voltage; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    0-7803-6520-8
  • Type

    conf

  • DOI
    10.1109/ICSICT.2001.981540
  • Filename
    981540