Title :
Process and Device Simulation with a Generic Scientific Simulation Environment
Author :
Spevak, Michael ; Heinzl, René ; Schwaha, Philipp ; Grasser, Tibor
Author_Institution :
Inst. for Microelectron., Tech. Univ. Vienna
Abstract :
We present a high performance environment for scientific simulation applications (GSSE). This environment is based on the three orthogonal concepts of topology, geometry, and quantities. Lambda calculus is used in order to assemble various partial differential equations for TCAD and other physical equations. We present examples from device and process simulation which show the applicability of our environment. Despite the high abstraction level we can achieve high performance
Keywords :
calculus; partial differential equations; technology CAD (electronics); TCAD; device simulation; generic scientific simulation environment; lambda calculus; partial differential equations; process simulation; Computational modeling; Differential equations; Electronic mail; Finite element methods; Libraries; Microelectronics; Partial differential equations; Solid modeling; Testing; Topology;
Conference_Titel :
Microelectronics, 2006 25th International Conference on
Conference_Location :
Belgrade
Print_ISBN :
1-4244-0117-8
DOI :
10.1109/ICMEL.2006.1650996
