Title :
Finite element analysis of SAW-transducers
Author_Institution :
Siemens Res. Centre, Erlangen, West Germany
Abstract :
It is shown that the simulation of an unweighted SAW-filter based on the numerical solution of the complete set of differential equations governing piezoelectric media is possible with an acceptable computational effort using piezoelectric finite elements. The excellent agreement between calculated impedance matrix, transmission coefficient, group delay, and their measured values proves the validity of the simulation process. These calculations are used to optimize the SAW-transducers and to obtain deeper insight into the wave propagation processes in piezoelectric SAW-devices. This simulation permits the study of parasitic effects introduced by bulk waves or the geometrical expansion of the electrodes
Keywords :
finite element analysis; surface acoustic wave devices; ultrasonic transducers; SAW-transducers; bulk waves; computational effort; differential equations; geometrical expansion; group delay; impedance matrix; numerical solution; parasitic effects; piezoelectric finite elements; piezoelectric media; simulation process; transmission coefficient; wave propagation processes; Acoustic waves; Circuit simulation; Computational modeling; Delay; Electrodes; Filters; Finite element methods; Impedance; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Circuits and Systems, 1988., IEEE International Symposium on
Conference_Location :
Espoo
DOI :
10.1109/ISCAS.1988.15190
